SST Model 3130 Vacuum Pressure Furnace

 

 

 

 

The Model 3130 is a vacuum and pressure furnace that provides precise automatic control of heating to 500°C (1000°C optional) and cooling in an inert gas environment from vacuum levels of below 50 millitorr to pressures exceeding 50 psig. Process profiles are easily created, and the process data can be analyzed off-line. The system is used in both production and research environments for flux-free soldering, brazing, annealing and glass sealing of components and packages for microelectronic applications.

Processes

Void-Free Die Soldering
Void-free die and substrate solder attach is used to create a uniform thermal interface for high reliability microelectronic devices.

Glass to Metal Sealing
Glass to metal sealing is performed at high temperatures to created hermetic seals for electrical feedthroughs and electronic components.

Hermetic Package Sealing
Hermetic package sealing uses solder or glass to create a barrier to moisture which will damage sensitive electrical circuit components.

Applications

Accelerometers
Atomic Clocks
Automotive Diodes
Automotive Sensors
CPV Solar Cell Modules
Fiber Optic Devices
Flip Chips
GaN MMIC's
Gated Light Arrays
Glass Diodes
Glass-to-Metal Seals
Hearing Aid Amplifiers
Hermetic Feed-Throughs
High Accuracy Gyroscopes
Implantable Medical Devices
Laser Pump Diodes
LED Lamps and Heaters
MEMS Devices
Microwave Packages

Specifications

Operating Temperature Range 100 to 500°C (1000°C optional)
Thermal Work Zone 35 in2 (225 cm2) maximum
Minimum Vacuum Level < 50 millitorr (< 0.067 mbar)
Maximum Chamber Gas Pressure Level 60 psig (5 bar)
Process Gasses N2 required, (Ar He, forming gas optional) @ 90 psig (7 bar) minimum pressure
Electrical Service 208-240 volts, 50/60 Hz, single phase, 60 amps, 5 kW average, 13 kW peak
Cooling Water: Required 2 gpm (8 lpm) @ 20-25°C, 2 kW minimum, 30 psig (2 bar) pressure differential
Work Surface Height 38 in (96 cm) adjustable
Overall Size (W x D x H):

54 x 43 x 43 in
(137 x 109 x 135 cm)

Weight: 1200 lb (545 kg)



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