The Profilm3D
3D Optical Profiler

 



 

LOW COST - HIGH ACCURACY
Filmetrics has made optical profilometry affordable.The Profilm3D uses state-of-the-art vertical scanning interferometry (VSI) combined with high-accuracy phase shifting interferometry (PSI). This provides access to surface topography from sub-nanometer to millimeter scale at an unheard-of price.

 

A 100mm AUTO-XY STAGE
Why pay extra for features everybody needs Our automated XY stage is standard on every Profilm3D. So is a tip/tilt stage.

 

LARGEST FIELD-OF-VIEW
The Profilm3D’s exceptionally wide field-of-view- 2 mm with a 10X objective lens - and its digital zoom reduces the need for multiple objective lenses, thus further reducing the overall cost of ownership. For applications where the flexibility of multiple objective lenses is still required, manual and automatic turrets are available.

 

Performance Specifications

Thickness Range, VSI 50 nm - 10 mm
Thickness Range, PSI 0 - 3 μm
RMS Repeatability, VSI 1.0 nm
RMS Repeatability, PSI 0.1 nm
Step-Height Accuracy 1 0.7%
Step-Height Repeatability 2 0.1%
Sample Reflectance Range 0.05% - 100%
ISO 25178 Compliant Yes

 


Mechanical Specifications

Z Range 100 mm
Piezo Range 500 μm
Scan Speed, Vertical 12 μm/sec
XY Stage Type Automated
XY Stage Range 100 mm x 100 mm
Tip/Tilt Stage +/- 5°, Manual
Camera 2592 x 1944 (5 megapixels)
Camera Zoom 3 1X, 2X, 4X
System Size, W x D x H 300 mm x 300 mm x 550 mm
System Weight 15 kg

 

Objectives 4
Magnification
2.5X
5X
10X
20X
50X
100X
Field of View at 1X Zoom
8.0 x 6.8 mm
4.0 x 3.4 mm 2.0 x 1.7 mm 1.0 x 0.85 mm 0.4 x 0.34 mm 0.2 x 0.17 mm
Numeric Aperture
0.075
0.13
0.3
0.4
0.55
0.7
Working Distance
10.3 mm
9.3 mm
7.4 mm
4.7 mm
3.4 mm
2.2 mm
Spatial Sampling at 4X Zoom 5
3.52 μm
1.76 μm
0.88 μm
0.44 μm
0.176 μm
0.088 μm
Resolving Power of Lens
3.7 μm
2.1 μm
0.92 μm
0.69 μm
0.5 μm
0.4 μm
Maximum Sample Slope 6
8.5°
14°
21°
25°
42°
 
1. 8 μm step, 1 sigma
2. 8 μm step, 100 successive measurements, 1 sigma.
3. Digitally realized. Number of effective pixels after binning is 648 x 484 for all zooms.
4. Sold separately
5. Pixel size projected on sample
6. Greater (better) for rough surfaces

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