Filmetric F60-t Series
Automated Thickess Mapping for Production Environments

 

 

 

  

The Filmetrics F60-t family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and the option to upgrade to fully robotic wafer handling.

The different F60-t instruments are distinguished primarily by thickness and wavelength range. Generally shorter wavelengths (e.g. F60-t-UV) are required to measure thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.



Model Specifications

 

 


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