ARC-lite
(Anti-reflective coating system for backside analysis)

 




ARC-lite is the world's first system to offer fast, reliable, room temperature AR coatings on package and wafer level devices.

ARC-lite is used as a free-standing unit for AR coating polished backside surfaces. The sample produced are optimized and require no baking.

ARC-lite reaches maximum functionality when used with ULTRA TEC's ASAP-1 Selected Area Preparation System -- The sample mounting plate (pictured below) can be conveniently transferred between ARC-lite and ASAP-1.


Advanced Imaging Fluids:

Two proprietary imaging fluids provide ARC-lite users with optimized backside imaging. The standard "EMMI" fluid has been recently joined by a new "FIB FRIENDLY" fluid that offers improved temperature stability, to allow backside modifications to be carried out on AR coated parts.

Product Highlights:

• Fast and convenient - 45 second process

• Up to 30% more transmitted photon efficiency

• Up to 60% improved contrast under NIR

• Inexpensive to own and operate

• Bench-top, quiet, room temp. process

• All package types and sizes + wafer shards

• ARC can be done ‘in-house' - NO BAKING!

Assists and optimizes emission microscopy, Laser, FIB, voltage, thermal, FMI, probing, and most other backside techniques


     

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